Advanced AMC free Handling System

Advanced AMC free Handling System
300mm FOUP Purification/AMC Free
董事會組織
台積公司董事會的九位董事擁有世界級公司經營經驗或專業領域經驗,他們的豐富學識、個人洞察力和商業判斷力,深受台積公司倚重。九位董事中,五位為獨立董事,分別為:前英國電信公司執行長彼得.邦菲爵士、宏碁集團創辦人暨榮譽董事長施振榮先生、前國家表演藝術中心董事長及前行政院政務顧問陳國慈女士、前應用材料公司董事長麥克‧史賓林特先生以及前賽靈思公司總裁摩西‧蓋弗瑞洛夫先生,獨立董事人數超過全體董事席次的二分之一,董事成員中並有二名為女性。
董事會職責
承續了台積公司創辦人張忠謀博士對公司治理的理念,在劉德音董事長及魏哲家總裁暨副董事長的領導下,董事會嚴肅對待它的責任,是一個「認真、有能力、獨立」的董事會。
董事會的首要責任是監督公司守法、財務透明、即時揭露重要訊息、沒有貪污等。為了善盡監督責任,台積公司董事會建立了各式組織與管道,例如審計委員會、薪酬委員會、隸屬審計委員會的財務專家顧問、內部稽核等。
董事會的第二個責任,是評量經營團隊之績效及任免經理人。台積公司經營階層與董事會之間維持著順暢良好的溝通,專心致力於執行董事會的指示與業務營運,以為股東創造最高利益。
董事會的第三個責任,是決議重要事項,例如資本支出、轉投資、股利等。
董事會的第四個責任是指導經營團隊。台積公司董事會每季定期聽取經營團隊的報告,也花相當多時間與經營階層對話,經營階層必須對董事會提擬公司策略,董事會必須評判這些策略成功的可能性,也必須經常檢視策略的進展,並且在需要時敦促經營團隊作調整。

BR Loadport Solution

Installation for existing loadports and in compliance with SEMI standards.
Function
XCDA gas purging on Carrier Base
Preventing contamination through purge port
Monitor Gas flow rate by flow switch meter
Optional / Capability
Stand alone system (RH, Temp., flow rate, pressure and data logging)
Support RFID_SECS/GEM Solution
Support HSMS Communication with MES.
Feature of Product
  • • Flexibility: Operating as an independent process tool.
  • • Defense system: Control by EAP and full authority to implement more sensors.
  • • Full SPC chart / mechanism to ensure the quality and safety.
Product Specifications
• 模組化設計:充氣模組及風刀模組可直接加裝。
• 支持各廠牌及各類型FOUP。
• 盤面充氣孔位已預留。
• 控制模組安裝於側板上可直接移除或更換。
• 側開式設計,大幅降低維修時間。

Purge Unit for Loadport Solution 

AMC Free
•Feasibility for all type of loadports.
•Disaster avoidance
•Particle Filtration ≥0.003um
•Support EAP to be controlled by CIM and integrate AMHS automation operations.
•Equipped with monitoring sensor, pressure switch, flow meter, which can be displayed on the GUI and returned to CIM/FDC in real time
•Comply with SEMI S22

Feature of Product
We provide customized solutions

Product Specifications

Laminar Flow Device EFEM

The best solution of contamination control for EFEM
Laminar flow device can effectively keep the invasion of down-flow moisture based on operation conditions of EFEM down-flow.
Laminar flow device speeds up the decreasing of RH% and keeps the EFEM humid air from invading into the FOUP.

Feature of Product

Product Specifications
• 有效防止因EFEM狀況不佳(即5種情況)所產生的流場將濕氣及AMC帶入FOUP內部,維持FOUP 內相對濕度。
• 裝設容易,僅需將風刀架設於FOUP開口與EFEM交界處上方,填充XCDA/N2即可產生一道均勻氣簾。
• 風刀產生之氣簾能有效隔絕EFEM流場濕氣及污染,同時結合Brillian Purge Unit for Loadport 系統,即可將FOUP內部濕氣及AMC帶出,達到最佳效果。
• 氣體顆粒過濾等級≥0.003um。

OHB N2 PURGE SYSTEM

OHB (Overhead Hoist Buffer)N2 Purge System
It is used in the front of the process and is installed under the Fab automation track. It is specially designed to remove moisture and oxygen content and extend Q-Time.

Feature of Product
Recipe Setting Available Mass Flow Controller Humidity Monitor.
FDC & Alarm Function RFID System Embedded.
Central / Local controllable.
Integrated with existing OHB/UTS.
Monitor Sensing.
Semi E84 compliance.
Control by PC base.
Inert gas of XCDA/N2.
Apply on FOUP Entegris , Shinetsu and others.
Communication:TCP/IP and SECS
Product Specifications

Item

OHB N2

安裝位置
自動化系統軌道下方
製程前後
前段/後段
適用FOUP
適用FOUP Barrier & ASYST& Entegris/ShinETSU
網路與通訊協定
TCP/IP SECS

UTS(Under Track Storage)

PURGE SYSTEM

UTS(Under Track Storage)Purge System
It is used in the front of the process and is installed under the Fab automation track. It is specially designed to remove moisture and oxygen content and extend Q-Time.

Feature of Product
Recipe Setting Available
Mass Flow Controller
Humidity Monitor
FDC & Alarm Function
RFID System Embedded
Product Specifications

Item

UTS

安裝位置
自動化系統軌道下方
製程前後
前段/後段
適用FOUP
適用FOUP Barrier & ASYST& Entegris/ShinETSU
網路與通訊協定
TCP/IP SECS
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